Мембранный клапан MV1

Мембранный клапан MV1

Product features

  • Metal-to-metal seal to atmosphere using metal diaphragms
  • Design optimized for low flow restriction and thorough electropolishing of the internal surfaces
  • All gas-wetted parts made of stainless steel SS 316L, Hastelloy C276 and PCTFE or PVDF respectively
  • Fully functional even when valve is evacuated
  • Welded valve stem / diaphragm assembly
  • No parts in the gas-wetted area exposed to friction or torsional stress provide minimum particle generation
  • Embedded soft seat seal made of PCTFE or PVDF permits frequent operation without loss of tightness
  • Modular design for easy replacement of internal parts
  • Clearly legible position indication (On/Off)
  • 100 % Helium-leak-tested
  • Assembly in cleanroom class 100/10
  • Long-term tests with over 25.000 cycles have been successfully carried out
  • Optional documentation acc. to SEMASPEC

Technical data

Other gas wetted parts:

Valve seat:

stainless steel 1.4404 ESU (SS 316L remelted)
Hastelloy C276

stainless steel 1.4404 ESU (SS 316L remelted)

Surface roughness
Ra ≤ 0,25 µm
Ra ≤ 0,18 µm
Leak rate 
to atmosphere:
via seat:

< 1 x 10-9 mbar l/s He
< 1 x 10-6 mbar l/s He
Pressure range  / weight 
Manual valve:
LP-pneumatic valve:
HP-pneumatic valve:

200 bar / 0,5 kg
25 bar / 0,7 kg
200 bar / 1,5 kg
Cv-value 0,24 (kv = 0,2)
Nominal size
DN 4
Temperature range -30°C to +60°C
In- / Outlet
tube stub 6x1x28 mm 
1/4" VCR-male
1/4" VCR-female
tube stub 1/4"

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