Газораспределительная панель MP2
Product features
- Pressure control panels for semiconductor gases from quality 6.0
- Waste gas valve
- Manual (pneumatic) process gas (EMO-) valve
- Purge gas valve
- Check valve to prevent process gas from flowing back into the puge gas line
- Pre-filter
- Pressure regulator
- Burst disc
- Filter for particle-free process gas supply
- Process gas line shut-off valve
- All gas-wetted parts made from stainless steel 1.4404 ESU as well as Hastelloy C and PCTFE
- 100 % helium-leak-tested
- Assembly in cleanroom class ISO 5.0
| Technical data | ||
|---|---|---|
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Materials Body: Diaphragm: Other gas wetted parts: Valve seat and stem: |
stainless steel 1.4404 ESU (SS 316L remelted) Hastelloy C276 stainless steel 1.4404 ESU (SS 316L remelted) PCTFE |
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Surface roughness optional: |
Ra ≤ 0,25 µm Ra ≤ 0,18 µm |
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Leak rate to atmosphere: via seat: |
< 1 x 10-9 mbar l/s He < 1 x 10-6 mbar l/s He |
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| Cv-value |
0,24 (kv = 0,2) |
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Temperature range |
-20°C to +70°C |
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