Регулятор давления E81-VCR
Product features
- Design optimized for low flow restriction and thorough electropolishing of the internal surfaces
- Minimized internal volume for short purge times
- All gas-wetted parts made of stainless steel SS 316L, Hastelloy C276 and PCTFE or PVDF respectively
- Single-stage regulator
- Regulator can be evacuated
- Internal connectors for pressure gauges
- High control accuracy
- Metal-to-metal seal to atmosphere
- High surface quality
- In-/Outlet UNF 7/8-14 (1/2” VCR-compatible); pressure indicator ports UNF 9/16-18 (1/4” VCR-compatible)
- Simple outlet pressure limitation by handwheel
- 100 % helium-leak-tested
- Assembly in cleanroom class ISO 5.0
- Optional documentation acc. to SEMASPEC
| Technical data | ||
|---|---|---|
|
Materials Body: Diaphragm: Gas-wetted parts: Valve seat: |
SS 1.4404 (SS 316L remelted) Hastelloy C276 SS 1.4404 (SS 316L remelted) PCTFE or PVDF |
|
|
Surface roughness upon request: |
Ra ≤ 0,25 µm Ra ≤ 0,18 µm |
|
|
Leak rate to atmosphere: via valve seat: |
< 1 x 10-9 mbar l/s He < 1 x 10-6 mbar l/s He |
|
|
Temperature / Pressure ranges Temperature: Inlet pressure: Outlet pressure: |
-30°C to +60°C max. 40 bar max. 1,5 / 4 / 10 bar |
|
| Cv-value |
1,0 |
|
| Weight |
1,7 kg |
|
|
In-/Outlet |
1/2" VCR-Female 1/2" VCR-Male other connectors upon request |
|
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